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ECE 550 / ME 550 - MEMS |
ECE Department | ME Department |College of Engineering | BYU
Instructors & Times
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Aaron Hawkins |
Brian Jensen |
Ben Tsai |
Jason Lund |
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Monday |
Tuesday |
Wednesday |
Thursday |
Friday |
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8:00 am |
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9:00 am |
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10:00 am |
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Jason Lund Office Hour (CB 187) |
Jensen Office Hour |
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11:00 am |
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Devotional |
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12:00 pm |
Lab Section 1 (Modeling in the CAEDM Lab) |
Lab Section 4
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550 Class - 340 CTB |
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550 Class - 340 CTB |
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1:00 pm |
Lab Section 1 (Modeling in the CAEDM Lab) |
Lab Section 4
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Ben Tsai Office Hour (CB 494) |
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2:00 pm |
Lab Section 1 (Modeling in the CAEDM Lab) |
Lab Section 4 |
Ben Tsai Office Hour |
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3:00 pm |
Lab Section 2 and 3 (Modeling
in 490 CB) |
Lab Section 5
(Modeling in 490 CB) |
Hawkins Office Hour |
Jason Lund Office Hour (CB 187) |
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4:00 pm |
Lab Section 2 and 3 (Modeling
in 490 CB) |
Lab Section 5
(Modeling in 490 CB) |
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5:00
pm |
Lab
Section 2 and 3 (Modeling in 490 CB) |
Lab Section 5
(Modeling in 490 CB) |
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6:00 pm |
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Syllabus
Text:
Chang Liu, Foundations of MEMS, 1st edition, Prentice Hall 2006, ISBN 0-13-147286-0.
Errata for this textbook: errata.pdf
Prerequisites
Either ECEn 450 or ME 372 or Instructor's Permission
Introduction
Welcome to MEMS, and to what will be a fun and intriguing adventure! MEMS is a rapidly emerging field of study and MEMS based projects are becoming increasingly important - as an example think of DLP Projector systems. There are many University research groups working on MEMs related topics and more and more commercial companies emerging in this field. MEMS is by its very nature multidisciplinary and has been developed by researchers from Electrical Engineering and Mechanical Engineering backgrounds but recently more and more fields have become involved in MEMS research, stretching from Biology to Physics. The specific topics that would fit under the umbrella of MEMS can be debated, which is usually true for any emerging field of study. In developing this course we have chosen what we consider the first defining textbook in this area. In choosing which topics to cover, we will be guided primarily by this text, with small diversions to emphasize the research topics we are actively participating in.
This class will bring together undergraduate and graduate students primarily from the Electrical and Mechanical Engineering majors. As such, we will attempt to include background material to assist EE's in understanding the mechanical aspects of the subjects and ME's the electrical aspect. ECEn 550 will be structured to emphasize both how MEMS devices work and how they are built. Lectures will be given on Wednesdays and Fridays which alternate between Dr. Hawkins and Dr. Jensen on these topics. In addition, lab sessions will be held on Monday and Tuesday afternoons to allow you to model and build MEMS related structures. The fabrication portion of these labs will be conducted in the BYU cleanroom in the Clyde building and the modeling portion will take place in room 490 and the CAEDM lab in the Clyde Building. The class will be broken into 5 different laboratory groups meeting at the times shown in the schedule above. Each group will participate in a total of 6 fabrication sessions and 6 modeling sessions. Your laboratory group will be assigned the first day of lecture.
Grading
Final grades for ECEn 550 will be based on the following distribution:
Laboratory Report
25 %
Homework
20 %
Midterm
25 %
Final
30 %
Homework
Homework assignments will be placed on the web. You should check this site regularly for updated information. Homework is due at 5:00 PM every other Friday, in the box marked ECEn 550, outside CB 413. The solution to the homework will be posted on the web, immediately after it is due. Because the homework solutions will be posted this way, late homework will not be accepted, no exceptions.
Cooperative group study on the homework is encouraged, but simply copying someone else's work is unethical and will leave the student unprepared for exams. Much insight can be gained by studying with one or more groups, if you discipline yourself to find your own solutions first before comparing results. Rely on other's help only when you have exhausted all of your own ideas or have made no progress for 15 or 20 minutes. Remember, the exams will be totally your own work and constitute the greater portion of the grade. One of the biggest contributor to excessive time spent on homework is failure to read the text material for understanding prior to attempting problems. The text is thorough and well written; take advantage of it!
Questions on homework grading should first be addressed to the TA who grades the homework. Unresolvable differences may be discussed with the professor during office hours.
Midterm Exam
We will have one midterm exam. The exam will be a take
home test. You will be given two hours to take the test and will be
bound by the honor code to follow the rules outlined on the
examination. The exam will be open book, open calculator, open
note. It must be completed in a blue examination booklet that can be
purchased in the bookstore. The exam will be handed out on October 17
and must be completed by October 20. Final Exam
The final exam will be a take home test. You will
be given three hours to take the test and will be bound by the honor code to
follow the rules outlined on the examination. The exam will be open
book, open calculator, open note. It must be completed in a blue
examination booklet that can be purchased in the bookstore. The exam
will be handed out during the final lecture of the semester and must be
completed by December 14. Laboratory -
ECEn550
The lab meets at a fixed time in room 487 of the Clyde
Building (the cleanroom) or in the CAEDM
lab or in 490 CB. The cleanroom will be the setting for the fabrication lab
exercises and the CAEDM lab or 490 CB will be the setting for the computer modeling lab exercises. (Note:
For your first session of the fabrication labs, you will meet in the conference
room area in room 494 of the Clyde Building for an orientation). Each
week you will alternate between a fabrication lab and a modeling lab. (See
the Laboratory exercise descriptions below) For example, Lab Group
1 has their lab session scheduled on Monday afternoons from noon to 3
pm. Their first week they will meet in the cleanroom for a fab lab, the
second week in the CAEDM lab for a modeling lab, the third week back in the cleanroom
for a fab lab. Lab Group 2, scheduled at the same time, will start with
a modeling lab the first week, then a fab lab, then a modeling lab.
The first day of class your lab groups will be assigned. We will
do our best to accommodate everyone's schedule. This fabrication lab is
a closed lab, so it is expected that you will finish all of your work in the
allotted time. The grading for these lab sections will be discussed
during the first meeting. The first lab sections will actually start on
Sept. 4, the second week into the Semester, after your lab groups have been
assigned. |
Miscellaneous
Office Hours.
Please respect professors' office hours. Just as taking
this class is not the only thing that you are doing this Semester, teaching
this class is only a part of what I do. While I desire to see you succeed in
this class, constant interruptions make it difficult to accomplish my other
obligations. If you have questions, please come during my office hours. If
they are not accommodating, please set up an appointment with me via email. Honor Code.
I expect you to live the honor code.
Cheating of any kind will result in a failing grade in the course. Calculators.
You will find a good scientific calculator extremely
useful during your engineering career. The minimum recommended calculator
must have trig, log, root, and exponential functions. Preparation for
Lectures.
Reading assignments will be given, and students are
expected to come to class having completed the assigned reading. Students may
be called on randomly to demonstrate their knowledge of the material by
working problems on the board to assist the class in understanding the
current discussion topic. The assigned reading pages for each day of lecture
are listed below in the lecture schedule. Preparation for
Exams.
If you would like to do well on exams, I suggest that you
do the following: Preventing Sexual
Harassment.
Title IX of the Educational Amendment of 1972 prohibits
sex discrimination against any participants in an educational program or
activity that receives federal funds. The act is intended to eliminate sex
discrimination in education. Title IX covers discrimination in programs,
admissions, activities, and student-to-student sexual harassment. BYU's
policy against sexual harassment extends not only to employees of the
university but to students as well. If you encounter unlawful sexual
harassment or gender based discrimination, please talk to your professor;
contact the Equal Employment Office at 378-5895 or 367-5689 (24-hour); or
contact the Honor Code Office at 378-2847. Students with
Disabilities.
Brigham Young University is committed to providing a
working and learning atmosphere which reasonably accommodates qualified
persons with disabilities. If you have any disability which may impair your
ability to complete this course successfully, please contact the Services for
Students with Disabilities Office (378-2767). Reasonable academic
accommodations are reviewed for all students who have qualified documented
disabilities. Services are coordinated with the student and instructor by the
SSD Office. If you need assistance or if you feel you have been unlawfully
discriminated against on the basis of disability, you may seek resolution
through established grievance policy and procedures. You should contact the
Equal Employment Office at 378-5895, D-282 ASB. |
Schedule and Assignments
ECE/ME 550 Class Lecture Schedule
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Week |
Date |
Lecture Topics |
Reading |
Homework |
Solutions |
Due |
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1 |
8/29,8/31 |
Intro to MEMS (B.J.), Intro to Microfabrication (A. H.) |
Ch. 1 Ch. 2 |
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2 |
9/5,9/7 |
Semiconductor Materials (B.J.),
Microfabrication (A.H.) |
Ch. 3 (pp. 45-58), Ch. 10 (pp. 326 - 346) |
9/14 |
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3 |
9/12, 9/14 |
Mechanical Properties (B.J.), Microfabrication (A.H.) |
Ch. 3 (pp. 58-72), Ch. 10 (pp. 346-370) |
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4 |
9/19, 9/21 |
Mechanical Properties (B.J.), Microfabrication (A.H.) |
Ch. 3 (pp. 73-83), Ch. 11 (pp. 371 - 381) |
9/28 |
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5 |
9/26, 9/28 |
Mechanical Properties (B.J.), Microfabrication (A.H.) |
Ch. 3 (pp. 83-91), Ch. 11 (pp. 381 -396) |
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6 |
10/3, 10/5 |
Mechanical Properties (B.J.), Electrostatics (A.H.) |
Ch. 3 (pp. 91-95) Ch. 4 (pp. 103 - 110) |
10/12 |
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7 |
10/10,10/12 |
Electrostatics (A.H.) |
Ch. 4 (pp. 110 - 152) |
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8 |
10/17,10/19 |
RF MEMS
(B.J.) |
10/26 |
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9 |
10/24,10/26 |
Thermal Sensing and Actuation (B.J.) |
Ch. 5 (pp.
153-191) |
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10 |
10/31,11/2 |
Thermal Sensing and Actuation (B.J.),
Piezoresistive Sensors (A.H.) |
Ch. 5 (pp. 191-200), Ch. 6 (pp. 207- 215) |
11/9 |
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11 |
11/7,11/9 |
Piezoresistive Sensors (A.H.), Piezoelectric Sensors (B.J.) |
Ch. 6 (pp. 216 - 244), Ch. 7 (pp. 245 - 257) |
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12 |
11/14,11/16 |
Piezoelectric Sensors (B.J.) Sensors and Actuators Summary (A.H.), |
Ch. 7 (pp. 257 - 273) Ch. 8, Ch. 9, |
11/26 |
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13 |
11/21, 11/23 |
No Class - Happy Thankgiving |
Read Ahead |
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14 |
11/28,11/30 |
SPM (B.J.), Microfluidics (A.H.) |
Ch. 14 (pp. XX - XX) Ch. 13 (pp. 422- 434) |
12/6 |
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15 |
12/5 |
Lab-on-a-Chip (A.H.) |
Ch. 13
(pp. 434 - 454) |
Click on the Homework assignment for a copy in PDF format. Click on the solution for a copy in PDF format. The homework solutions are given to you as a learning aid. Please do not deprive future students of the opportunity to struggle with these problems and learn from them by copying and distributing solutions. I consider printing these solutions as a violation of the honor code. Please restrict yourself to viewing them on-line. Remember, education is not about getting grades, its about learning to think!
ECE/ME 550 Laboratory Schedule
Fabrication Topics (In the
Cleanroom)
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Week |
Laboratory Topic |
Lab Outline |
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1 |
Laboratory Safety |
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2 |
KOH Etching |
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3 |
Compliant Mechanism |
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4 |
Compliant Mechanism |
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5 |
Capacitive Switch |
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6 |
Capacitive
Switch |
Modeling Topics (490 CB)
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Week |
Laboratory Topic |
Lab Outline |
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1 |
Matlab Model of Bistable
Mechanism |
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2 |
Intro to Finite Element
Modeling (FEM) |
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3 |
Modal Analysis of a Folded Beam Suspension |
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4 |
ANSYS Simulation of an
Electrostatic Switch |
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5 |
Analysis of a Bimorph
Actuator using ANSYS |
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6 |
Force Analysis of a MEMS Contact Switch |
Click on the Lab Outline for a given week for a copy in PDF format. All documents are in PDF format. You will need the Adobe Acrobat Reader to view them. To download a free copy of Adobe Acrobat Reader, click here.
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Group
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Group
2 |
Group
3 |
Group
4 |
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Phillip Thomas |
Yaeji Lim |
Lawrence Barrett |
David Landry |
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Kris Jones |
Jake Merrell |
Travis Rampton |
Sripriya Rashavendran |
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Jordan Tanner |
Matthieu Girard-Carrier |
Steven Brewer |
Sadek Sabbah |
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Kevin Marr |
Michael Olson |
Dustin Hill |
Joseph Oxborrow |
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Group
5 |
Group
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Group 8 |
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| Tyler Lewis |
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| Brian Webster |
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| Zachary Lindstrom |
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| Scott Eisele |
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Important Dates.
Midterm Due Midnight Oct 20
Final Exam Due Midnight Dec 14